(1-Ethylcyclooctyl) Methacrylate
●CAS No.: 910914-92-0
●Molecular Formula: C₁₄H₂₄O₂
●Molecular Weight: 224.34
●Description: (1-Ethylcyclooctyl) methacrylate is a methacrylate monomer with a unique alicyclic ring structure. The compound is synthesized from cyclooctanone through two core reaction steps, with both steps designed to meet the stringent purity requirements of photoresist monomers. The bulky cyclooctyl group introduced into the molecule significantly increases the glass transition temperature and thermal stability of the resulting polymer, while also imparting excellent etch resistance to the resin. This product is primarily used as a monomer for photoresist resins, particularly well-suited for the development of deep ultraviolet (DUV) and extreme ultraviolet (EUV) photoresist systems, and serves as a key functional monomer in the field of semiconductor lithography materials.
